"A monolithic integration of a tunable MEMS capacitor with GaN technology."

Imed Zine-El-Abidine, James Dietrich (2011)

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DOI: 10.1109/CCECE.2011.6030490

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Imed Zine-El-Abidine, James Dietrich:
A monolithic integration of a tunable MEMS capacitor with GaN technology. CCECE 2011: 447-449

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