"Effect of image degradation on nm-scale MEMS FFT optical displacement ..."

Hunter King, Stephan Warnat, Ted Hubbard (2015)

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DOI: 10.1109/CCECE.2015.7129482

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Hunter King, Stephan Warnat, Ted Hubbard:
Effect of image degradation on nm-scale MEMS FFT optical displacement measurements. CCECE 2015: 1387-1392

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