"Holes Effects on RF MEMS Parallel Membranes Capacitors."

A. Bendali et al. (2006)

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DOI: 10.1109/CCECE.2006.277600

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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A. Bendali, R. Labedan, F. Domingue, V. Nerguizian:
Holes Effects on RF MEMS Parallel Membranes Capacitors. CCECE 2006: 2140-2143

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