"Simulation and optical measurement of MEMS thermal actuator sub-micron ..."

Bruno Barazani, Stephan Warnat, Ted Hubbard (2015)

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DOI: 10.1109/CCECE.2015.7129090

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-26

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Bruno Barazani, Stephan Warnat, Ted Hubbard:
Simulation and optical measurement of MEMS thermal actuator sub-micron displacements in air and water. CCECE 2015: 1-6

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