"An information-theory and Virtual Metrology-based approach to Run-to-Run ..."

Gian Antonio Susto et al. (2012)

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DOI: 10.1109/COASE.2012.6386416

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Gian Antonio Susto, Andrea Schirru, Simone Pampuri, Giuseppe De Nicolao, Alessandro Beghi:
An information-theory and Virtual Metrology-based approach to Run-to-Run semiconductor manufacturing control. CASE 2012: 358-363

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