"Sampling Decision System in semiconductor manufacturing using Virtual ..."

Daniel Kurz, Cristina De Luca, Jürgen Pilz (2012)

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DOI: 10.1109/COASE.2012.6386366

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Daniel Kurz, Cristina De Luca, Jürgen Pilz:
Sampling Decision System in semiconductor manufacturing using Virtual Metrology. CASE 2012: 74-79

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