"Monitoring of a sampled process data under Run-to-Run control: application ..."

Taki Eddine Korabi et al. (2019)

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DOI: 10.1109/COASE.2019.8843229

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton:
Monitoring of a sampled process data under Run-to-Run control: application to a semiconductor process. CASE 2019: 930-935

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