"Automatic virtual metrology system design and implementation."

Yi-Ting Huang et al. (2008)

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DOI: 10.1109/COASE.2008.4626524

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Yi-Ting Huang, Hsien-Cheng Huang, Fan-Tien Cheng, Tai-Siang Liao, Fu-Chien Chang:
Automatic virtual metrology system design and implementation. CASE 2008: 223-229

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