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"Virtual-metrology-based FDC scheme."
Yao-Sheng Hsieh, Fan-Tien Cheng, Haw Ching Yang (2012)
- Yao-Sheng Hsieh, Fan-Tien Cheng, Haw Ching Yang:
Virtual-metrology-based FDC scheme. CASE 2012: 80-85
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