"Modeling, Simulation and Supervisory Control of Semiconductor ..."

Cheolhui Hong, Tae-Eog Lee (2020)

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DOI: 10.1109/CASE48305.2020.9216790

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-25

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Cheolhui Hong, Tae-Eog Lee:
Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module. CASE 2020: 703-709

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