"Wafer-level inspection system for the automated testing of comb drive ..."

Felix Beyeler, Simon Muntwyler, Bradley J. Nelson (2010)

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DOI: 10.1109/COASE.2010.5584102

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-25

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Felix Beyeler, Simon Muntwyler, Bradley J. Nelson:
Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators. CASE 2010: 698-703

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