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"Micromachined PMN-PT single crystal diaphragm for piezoelectric sensing ..."
Jue Peng et al. (2011)
- Jue Peng, Xinyu Zhang, Guo Dan, Tianfu Wang, Siping Chen:
Micromachined PMN-PT single crystal diaphragm for piezoelectric sensing applications. BMEI 2011: 1144-1147
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