"Automated Performance Optimisation and Layout Synthesis of MEMS ..."

Chenxu Zhao, Tom J. Kazmierski (2008)

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DOI: 10.1109/BMAS.2008.4751233

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-21

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Chenxu Zhao, Tom J. Kazmierski:
Automated Performance Optimisation and Layout Synthesis of MEMS Accelerometer with Sigma-Delta Force-Feedback Control Loop. BMAS 2008: 19-24

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