"SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and ..."

J. F. Souza et al. (2012)

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type: Conference or Workshop Paper

metadata version: 2013-10-01

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  dblp key:
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  - https://dblp.org/rec/conf/biostec/SouzaLDTDG12
J. F. Souza, M. B. Lima, I. Doi, P. J. Tatsch, J. A. Diniz, J. L. Gonçalves:
SiNx/SiO2 Stacked Sensitive Thin Film for ISFET-based Chemical and Biochemical Sensors - Preparation and Characterization of the Stacked Thin Films and Sensors. BIODEVICES 2012: 302-306

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