"SLCFET Amplifier Performance Improvements Using an ALD TiN T-Gate Process."

Timothy Vasen et al. (2022)

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DOI: 10.1109/BCICTS53451.2022.10051706

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-06

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Timothy Vasen, Brian Novak, Marc Scimonelli, Kevin Frey, Mustapha Saad, Abbey Saia, Benjamin Grisafe, Ken A. Nagamatsu, Josephine Chang, Virginia Wheeler, Karl D. Hobart, Andrew D. Koehler, Patrick Shea, Stephen Van Campen, Robert S. Howell, Shamima Afroz:
SLCFET Amplifier Performance Improvements Using an ALD TiN T-Gate Process. BCICTS 2022: 120-123

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