"Note on CapsNet-Based Wafer Map Defect Pattern Classification."

Itsuki Fujita et al. (2021)

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DOI: 10.1109/ATS52891.2021.00019

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Itsuki Fujita, Yoshikazu Nagamura, Masayuki Arai, Satoshi Fukumoto:
Note on CapsNet-Based Wafer Map Defect Pattern Classification. ATS 2021: 37-42

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