"Layout decomposition co-optimization for hybrid e-beam and multiple ..."

Yunfeng Yang et al. (2015)

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DOI: 10.1109/ASPDAC.2015.7059082

access: closed

type: Conference or Workshop Paper

metadata version: 2023-08-16

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Yunfeng Yang, Wai-Shing Luk, Hai Zhou, Changhao Yan, Xuan Zeng, Dian Zhou:
Layout decomposition co-optimization for hybrid e-beam and multiple patterning lithography. ASP-DAC 2015: 652-657

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