"Barrier and low k polish with a novel alkaline barrier slurry combining ..."

Jingbo Xu et al. (2013)

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DOI: 10.1109/ASICON.2013.6812070

access: closed

type: Conference or Workshop Paper

metadata version: 2023-05-02

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Jingbo Xu, Feng Hui, Wen-Zhong Xu, Xu Wang, Peng-Fei Nan, Yu-Ling Liu, Xin-Ping Qu:
Barrier and low k polish with a novel alkaline barrier slurry combining with FA/O chelating agent. ASICON 2013: 1-4

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