"Overshoot stress impact on HfO2 high-κ layer dynamic SILC."

Guangxing Wan et al. (2015)

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DOI: 10.1109/ASICON.2015.7516943

access: closed

type: Conference or Workshop Paper

metadata version: 2018-07-17

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Guangxing Wan, Tianli Duan, Shuxiang Zhang, Lingli Jiang, Bo Tang, Chao Zhao, Huilong Zhu, Hongyu Yu:
Overshoot stress impact on HfO2 high-κ layer dynamic SILC. ASICON 2015: 1-4

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