"Force optimization of a linear motion type electrostatic microactuator ..."

Md Ghazaly Mariam et al. (2015)

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DOI: 10.1109/ASCC.2015.7244870

access: closed

type: Conference or Workshop Paper

metadata version: 2018-05-14

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Md Ghazaly Mariam, Lim Tzi Khang, Aliza Che Amran, Sato Kaiji:
Force optimization of a linear motion type electrostatic microactuator using finite element method (FEM) analysis for high thrust performances. ASCC 2015: 1-4

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