"Rapid Precision Positioning with Transition-Positioning Switching in ..."

Zezhou Zhang et al. (2019)

> Home

Details and statistics

DOI: 10.23919/ACC.2019.8814382

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/amcc/ZhangZZP19
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/amcc/ZhangZZP19
Zezhou Zhang, Jianxiao Zou, Jian Zhang, Chao Peng:
Rapid Precision Positioning with Transition-Positioning Switching in Stepper Lithography. ACC 2019: 5687-5692

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.