"Energy-based control for MEMS with one-sided actuation."

Harshad S. Sane (2006)

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DOI: 10.1109/ACC.2006.1656382

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-04

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Harshad S. Sane:
Energy-based control for MEMS with one-sided actuation. ACC 2006

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