"Design fabrication of high-precision stage and ultrahigh-speed nanoscale ..."

Koichi Sakata et al. (2009)

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DOI: 10.1109/ACC.2009.5160031

access: closed

type: Conference or Workshop Paper

metadata version: 2020-04-06

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Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Kazuaki Saiki:
Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning. ACC 2009: 2254-2259

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