"On intermittent-contact mode sensing using electrostatically-actuated ..."

Deepak R. Sahoo et al. (2008)

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DOI: 10.1109/ACC.2008.4586792

access: closed

type: Conference or Workshop Paper

metadata version: 2022-04-09

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  - conf/amcc/SahooHBSPE08
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Deepak R. Sahoo, Walter Häberle, Peter Bächtold, Abu Sebastian, Haralampos Pozidis, Evangelos Eleftheriou:
On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors. ACC 2008: 2034-2039

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