"Next-generation wafer stage motion control: Connecting system ..."

Tom Oomen et al. (2012)

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DOI: 10.1109/ACC.2012.6314685

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-08

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Tom Oomen, Robbert van Herpen, Sander Quist, Marc M. J. van de Wal, Okko H. Bosgra, Maarten Steinbuch:
Next-generation wafer stage motion control: Connecting system identification and robust control. ACC 2012: 2455-2460

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