"A switching gain scheduled approach for wafer transfer robots and its ..."

Shinsuke Oh-Hara, Kenji Hirata, Yoshito Ohta (2006)

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DOI: 10.1109/ACC.2006.1657327

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Shinsuke Oh-Hara, Kenji Hirata, Yoshito Ohta:
A switching gain scheduled approach for wafer transfer robots and its experimental evaluations. ACC 2006: 1-6

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