"Characterization of a Tilted-beam Piezoresistive MEMS Sensor with ..."

Nastaran Nikooienejad, Mohammad Maroufi, S. O. Reza Moheimani (2019)

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DOI: 10.23919/ACC.2019.8815024

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Nastaran Nikooienejad, Mohammad Maroufi, S. O. Reza Moheimani:
Characterization of a Tilted-beam Piezoresistive MEMS Sensor with Current-drive Readout Circuit. ACC 2019: 2483-2488

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