"A self-resonant MEMS-based electrostatic field sensor."

Kent H. Lundberg et al. (2006)

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DOI: 10.1109/ACC.2006.1656384

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-04

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Kent H. Lundberg, John S. Shafran, Jinbo Kuang, Mike Judy, Timothy Allman Denison:
A self-resonant MEMS-based electrostatic field sensor. ACC 2006

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