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"Model predictive control of film porosity in thin film deposition."
Gangshi Hu, Gerassimos Orkoulas, Panagiotis D. Christofides (2009)
- Gangshi Hu, Gerassimos Orkoulas, Panagiotis D. Christofides:
Model predictive control of film porosity in thin film deposition. ACC 2009: 4797-4804
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