"Multiscale modeling and control of RF diode sputter deposition for GMR ..."

Sarbajit Ghosal et al. (2004)

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DOI: 10.23919/ACC.2004.1383923

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-24

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Sarbajit Ghosal, Robert L. Kosut, Jon L. Ebert, La Moyne L. Porter:
Multiscale modeling and control of RF diode sputter deposition for GMR thin films. ACC 2004: 3930-3941

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