"Model-based control for semiconductor and advanced materials processing: ..."

Abbas Emami-Naeini et al. (2004)

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DOI: 10.23919/ACC.2004.1383920

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-24

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Abbas Emami-Naeini, Jon L. Ebert, Robert L. Kosut, Dick de Roover, Sarbajit Ghosal:
Model-based control for semiconductor and advanced materials processing: an overview. ACC 2004: 3902-3909

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