"Closed-loop voltage control of a parallel-plate MEMS electrostatic actuator."

Lili Dong, Jason Edwards (2010)

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DOI: 10.1109/ACC.2010.5531118

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Lili Dong, Jason Edwards:
Closed-loop voltage control of a parallel-plate MEMS electrostatic actuator. ACC 2010: 3409-3414

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