"A new approach to spatially controllable CVD."

Jae-Ouk Choo et al. (2004)

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DOI: 10.23919/ACC.2004.1383619

access: closed

type: Conference or Workshop Paper

metadata version: 2022-11-24

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Jae-Ouk Choo, Raymond A. Adomaitis, Gary W. Rubloff, Laurent Henn-Lecordier, Yuhong Cai:
A new approach to spatially controllable CVD. ACC 2004: 287-292

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