"Design fabrication and control of 4-DOF high-precision stage."

Koichi Sakata et al. (2010)

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DOI: 10.1109/AMC.2010.5464104

access: closed

type: Conference or Workshop Paper

metadata version: 2019-01-23

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Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Takeshi Ohtomo, Kazuaki Saiki:
Design fabrication and control of 4-DOF high-precision stage. AMC 2010: 366-370

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