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"Decoupling control by the center of rotation and gravity hybrid-driven ..."
Wataru Ohnishi et al. (2016)
- Wataru Ohnishi, Hiroshi Fujimoto, Koichi Sakata, Kazuhiro Suzuki, Kazuaki Saiki:
Decoupling control by the center of rotation and gravity hybrid-driven method for high-precision scan stage with multiple actuators. AMC 2016: 528-532
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