"Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting."

Alessandro Nastro et al. (2021)

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DOI: 10.1007/978-3-031-08136-1_41

access: closed

type: Conference or Workshop Paper

metadata version: 2023-12-03

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Alessandro Nastro, Marco Baù, Marco Ferrari, Vittorio Ferrari:
Piezoelectric MEMS for Sensors, Actuators and Energy Harvesting. AISEM 2021: 264-270

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