"Integrated Force Sensor based on Optical Distance Measurement for a ..."

Christian Schwaer et al. (2022)

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DOI: 10.1109/AIM52237.2022.9863267

access: closed

type: Conference or Workshop Paper

metadata version: 2022-08-30

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Christian Schwaer, David Stefanek, Andreas Sinn, Georg Schitter:
Integrated Force Sensor based on Optical Distance Measurement for a Modular Actuator used in Active Optics. AIM 2022: 496-501

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