"High throughput, parallel Scanning Probe microscope for nanometrology and ..."

Hamed Sadeghian et al. (2017)

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DOI: 10.1109/AIM.2017.8014099

access: closed

type: Conference or Workshop Paper

metadata version: 2020-11-23

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Hamed Sadeghian, Philip C. Paul, Rodolf W. Herfst, Bert Dekker, Jasper Winters, Klara Maturova:
High throughput, parallel Scanning Probe microscope for nanometrology and nanopatterning applications. AIM 2017: 700-705

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