"AFM Microcantilever with On-chip Electrothermal and Piezoelectric ..."

Hazhir Mahmoodi Nasrabadi et al. (2023)

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DOI: 10.1109/AIM46323.2023.10196135

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-05

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Hazhir Mahmoodi Nasrabadi, Nastaran Nikooienejad, K. S. Vikrant, S. O. Reza Moheimani:
AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation. AIM 2023: 94-98

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