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"AFM Microcantilever with On-chip Electrothermal and Piezoelectric ..."
Hazhir Mahmoodi Nasrabadi et al. (2023)
- Hazhir Mahmoodi Nasrabadi, Nastaran Nikooienejad, K. S. Vikrant, S. O. Reza Moheimani:
AFM Microcantilever with On-chip Electrothermal and Piezoelectric Transducers: Z-axis Control and Standalone Operation. AIM 2023: 94-98
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