"Design and Fabrication of Electromagnetic Induction Type MEMS Generators ..."

Minami Kaneko et al. (2018)

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DOI: 10.1109/AIM.2018.8452283

access: closed

type: Conference or Workshop Paper

metadata version: 2019-02-04

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Minami Kaneko, Kazuya Kudo, Kaito Mishima, Kazuki Ebisawa, Ken Saito, Fumio Uchikoba:
Design and Fabrication of Electromagnetic Induction Type MEMS Generators with Ceramic Magnetic Circuit. AIM 2018: 580-585

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