"Nanopositioning MEMS stage for high speed positioning of metamaterials ..."

R. W. Herfst et al. (2017)

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DOI: 10.1109/AIM.2017.8014199

access: closed

type: Conference or Workshop Paper

metadata version: 2019-02-04

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R. W. Herfst, R. J. F. Bijster, A. Dekker, J. Wei, H. W. van Zeijl, R. Kruidhof, Hamed Sadeghian:
Nanopositioning MEMS stage for high speed positioning of metamaterials lenses for use in high resolution optical imaging. AIM 2017: 1310-1315

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