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"Development of high accuracy of magnetic levitation transport system for ..."

Chang-Wan Ha, Chang-Hyun Kim, Jaewon Lim (2017)

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DOI: 10.1109/AIM.2017.8014203

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Chang-Wan Ha, Chang-Hyun Kim, Jaewon Lim:
Development of high accuracy of magnetic levitation transport system for OLED evaporation process. AIM 2017: 1334-1339

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