"A high-bandwidth closed-loop MEMS force sensor with system dynamics ..."

Diyako Dadkhah, S. O. Reza Moheimani (2023)

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DOI: 10.1109/AIM46323.2023.10196208

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Diyako Dadkhah, S. O. Reza Moheimani:
A high-bandwidth closed-loop MEMS force sensor with system dynamics adjustment. AIM 2023: 79-84

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