"Development of a MEMS position transducer using bulk piezoresistivity of ..."

Ali Bazaei et al. (2014)

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DOI: 10.1109/AIM.2014.6878290

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O. Reza Moheimani:
Development of a MEMS position transducer using bulk piezoresistivity of suspensions. AIM 2014: 1469-1473

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