"Sensing bandwidth of electrothermal MEMS transducers in constant voltage ..."

Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani (2014)

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DOI: 10.1109/AIM.2014.6878289

access: closed

type: Conference or Workshop Paper

metadata version: 2023-09-30

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Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani:
Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes. AIM 2014: 1464-1468

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