"Moving horizon estimation for in situ monitoring of chemical vapor ..."

Rentian Xiong, Martha A. Gallivan (2007)

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DOI: 10.1109/ACC.2007.4282885

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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Rentian Xiong, Martha A. Gallivan:
Moving horizon estimation for in situ monitoring of chemical vapor deposition process. ACC 2007: 3648-3653

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