"Identification and Evaluation of a Dynamic Model for a Thin Film ..."

Cihan Oguz, Martha A. Gallivan (2007)

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DOI: 10.1109/ACC.2007.4282844

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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Cihan Oguz, Martha A. Gallivan:
Identification and Evaluation of a Dynamic Model for a Thin Film Deposition Process. ACC 2007: 4124-4129

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