"Adaptive Optical Proximity Correction Using an Optimization Method."

Tetsuaki Matsunawa et al. (2007)

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DOI: 10.1109/CIT.2007.133

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/IEEEcit/MatsunawaNSMTTTSH07
Tetsuaki Matsunawa, Hirokazu Nosato, Hidenori Sakanashi, Masahiro Murakawa, Eiichi Takahashi, Tsuneo Terasawa, Toshihiko Tanaka, Osamu Suga, Tetsuya Higuchi:
Adaptive Optical Proximity Correction Using an Optimization Method. CIT 2007: 853-860

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