"Temperature control of wafer in semiconductor manufacturing systems by ..."

Kazuyuki Matsumoto et al. (2004)

> Home

Details and statistics

DOI: 10.1109/CCA.2004.1387572

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-14

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/IEEEcca/MatsumotoSKF04
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/IEEEcca/MatsumotoSKF04
Kazuyuki Matsumoto, Keita Suzuki, Sadaaki Kunimatsu, Takao Fujii:
Temperature control of wafer in semiconductor manufacturing systems by MR-ILQ design method. CCA 2004: 1410-1414

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.