"Design and control of a MEMS nanopositioner with bulk piezoresistive sensors."

Mohammad Maroufi, Yuen Kuan Yong, S. O. Reza Moheimani (2015)

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DOI: 10.1109/CCA.2015.7320816

access: closed

type: Conference or Workshop Paper

metadata version: 2020-06-15

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Mohammad Maroufi, Yuen Kuan Yong, S. O. Reza Moheimani:
Design and control of a MEMS nanopositioner with bulk piezoresistive sensors. CCA 2015: 1455-1460

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